| Model No. | QV ACCEL808 | QV ACCEL1010 | ||
| Order No. | QV-A808P1L-D | QV-A1010P1L-D | ||
| Measuring range (XxYxZ) | 800x800x150 mm | 1000x1000x150 mm | ||
| Observation unit | PT1X-2X-6X | |||
| Imaging device | B&W CCD (1/2 inch) | |||
| Accuracy | E1X, E1Y | (1.5+3L/1000) µm | ||
| E1Z | (1.5+4L/1000) µm | |||
| E2XY | (2.5+4L/1000) µm | |||
| Repeatability | Short dimensions | XY axis | 3σ=0.2 µm | |
| Long dimensions | 3σ=0.7 µm | |||
| Tracking auto focus device | Optional | |||





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