| Model No. | ULTRA QV404 | |
| Measuring range (XxYxZ) | 400x400x200 mm | |
| Observation unit | PT1X-2X-6X | |
| Imaging device | B&W CCD (1/2 inch) | |
| Accuracy (E1) | E1X, E1Y | (0.25+L/1000) µm |
| E1Z (Full stroke) | (1.5+2L/1000) µm (Range 200 mm) | |
| E1Z (50 mm stroke) | (1.0+2L/1000) µm (Range 10 to 60 mm) | |
| Accuracy (E2) | E2XY | (0.5+2L/1000) µm |
| Tracking auto focus device | Optional | |





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