| Model No. | CV-2100M4 | CV-2100N4 | |
| Measuring range | X axis | 100 mm | |
| Z1 axis (detector unit) | 50 mm | ||
| Z2-axis (column) travel range | 350 mm | — | |
| X-axis inclination angle | ±45o | ||
| Resolution | X axis | 0.1 µm | |
| Z1 axis | 0.1 µm | ||
| Drive method | X axis | Motor (0-20 mm/s) | |
| Vertical travel (Z-axis column) | Manual (Quick-vertical-motion, fine) | — | |
| Measuring speed | 0.02, 0.05, 0.1, 0.2, 0.5, 1.0, 2.0, 5.0 mm/s | ||
| Straightness (when the X axis is horizontal) | 2.5 µm/100 mm | ||
| Accuracy (20 oC) | X axis | ±(2.5+0.02L) µm L= Measurement Length (mm) | |
| Z1 axis | ±(2.5+|0.1|) µm H= Measurement height from horizontal position within ±25 mm | ||
| Measuring direction | Both pulling and pushing directions | ||
| Measuring face direction | Downward direction | ||
| Measuring force | 30±10 mN (3 gf) | ||
| Traceable angle (using the standard stylus) | Ascent 77o, Descent 87o (according to surface property) | ||
| External dimensions (WxDxH) | 745 x 450 x 885 mm | 651 x 143 x 138.5 mm | |
| Mass | 145.8 kg | 5.8 kg | |





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